Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method
A lithographic apparatus having a radiation beam inspection device including a barrier to the beam of radiation, the barrier having an aperture through which a portion of the beam of radiation passes; and a radiation sensor that determines the intensity of the radiation passing through the aperture...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A lithographic apparatus having a radiation beam inspection device including a barrier to the beam of radiation, the barrier having an aperture through which a portion of the beam of radiation passes; and a radiation sensor that determines the intensity of the radiation passing through the aperture and the position, relative to the aperture, of the point at which the radiation is incident on the radiation sensor. |
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