Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction

A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the conducting electrode and a partial are...

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Bibliographische Detailangaben
Hauptverfasser: Kuisma, Heikki, Lahdenperä, Juha, Mutikainen, Risto
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the conducting electrode and a partial area formed under the conducting electrode, and a thickness (d) of the partial area of the insulating layer is less than a thickness (d) of the support areas of the insulating area.