Thin layer semi-conductor structure comprising a heat distribution layer

The invention concerns a thin layer semi-conductor structure including a semi-conductor surface layer separated from a support substrate by an intermediate zone, the intermediate zone being a multi-layer electrically insulating the semi-conductor surface layer from the support substrate. The interme...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Joly, Jean-Pierre, Bruel, Michel, Jaussaud, Claude
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention concerns a thin layer semi-conductor structure including a semi-conductor surface layer separated from a support substrate by an intermediate zone, the intermediate zone being a multi-layer electrically insulating the semi-conductor surface layer from the support substrate. The intermediate zone has a considered sufficiently good electrical quality of interface with the semi-conductor surface layer and includes at least one first layer, of satisfactory thermal conductivity to provide a considered as correct operation of the electronic device or devices which are to be elaborated from the semi-conductor surface layer, the intermediate zone including additionally a second insulating layer of low dielectric constant, located between the first layer and the support substrate.