Thin layer semi-conductor structure comprising a heat distribution layer
The invention concerns a thin layer semi-conductor structure including a semi-conductor surface layer separated from a support substrate by an intermediate zone, the intermediate zone being a multi-layer electrically insulating the semi-conductor surface layer from the support substrate. The interme...
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Sprache: | eng |
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Zusammenfassung: | The invention concerns a thin layer semi-conductor structure including a semi-conductor surface layer separated from a support substrate by an intermediate zone, the intermediate zone being a multi-layer electrically insulating the semi-conductor surface layer from the support substrate. The intermediate zone has a considered sufficiently good electrical quality of interface with the semi-conductor surface layer and includes at least one first layer, of satisfactory thermal conductivity to provide a considered as correct operation of the electronic device or devices which are to be elaborated from the semi-conductor surface layer, the intermediate zone including additionally a second insulating layer of low dielectric constant, located between the first layer and the support substrate. |
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