Rotating recorder with dual encoder arrangement having eccentricity compensation

A rotating recording device, such as an electron beam recorder, is provided with a dual encoder arrangement. A first encoder is employed as a spindle motor controller and located at a first end of a spindle. A second encoder is mounted at a turntable adjacent to a recording surface and used as a pos...

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Bibliographische Detailangaben
Hauptverfasser: Bryant, Lawrence M, Chauhan, Sundeep, Kuo, David Shiao-Min
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A rotating recording device, such as an electron beam recorder, is provided with a dual encoder arrangement. A first encoder is employed as a spindle motor controller and located at a first end of a spindle. A second encoder is mounted at a turntable adjacent to a recording surface and used as a position, velocity or clock source for recording the pattern on the substrate. Eccentricity of the mounting of the second encoder is measured against the more accurately mounted spindle control encoder and compensated by a digital clock generating system using a digital phase locked loop.