System and method for positioning an object through use of a rotating laser metrology system

A motion system includes a first stage that is configured to rotate about a first axis and a second stage coupled to the first stage that includes an object carrier adapted to position an object in at least one other axis. The motion system has a novel arrangement of laser interferometer elements and axes of motion. The arrangement permits accurate and precise measurement of a position of the object carrier in up to three (or more) axes of motion even as the first stage of the motion system is tilted through relatively large angles. The novel arrangement of the axes of motion also enables very precise control of the position of the object carrier even at high tilt angles.