Ion beam device and ion beam processing method, and holder member

Ion beam device and ion beam processing method, and holder member

An apparatus has a holder member which holds a sample, and a removing beam source which irradiates an inert ion beam onto a cross section of the sample held by a holder member and removes a fracture layer on the cross section. Then, the removing beam source is disposed on the holding end side of the...

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Hauptverfasser: Kodama, Toshio, Hasuda, Masakatsu, Fuji, Toshiaki, Iwasaki, Kouji, Sugiyama, Yasuhiko, Takagi, Yasuyuki
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Sprache:eng
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creator Kodama, Toshio
Hasuda, Masakatsu
Fuji, Toshiaki
Iwasaki, Kouji
Sugiyama, Yasuhiko
Takagi, Yasuyuki
description An apparatus has a holder member which holds a sample, and a removing beam source which irradiates an inert ion beam onto a cross section of the sample held by a holder member and removes a fracture layer on the cross section. Then, the removing beam source is disposed on the holding end side of the sample with respect to the normal L of the cross section so that the irradiating direction of the inert ion beam is tilted at the tilt angle θ to the normal L with respect to the cross section.
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title Ion beam device and ion beam processing method, and holder member
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