Ion beam device and ion beam processing method, and holder member

An apparatus has a holder member which holds a sample, and a removing beam source which irradiates an inert ion beam onto a cross section of the sample held by a holder member and removes a fracture layer on the cross section. Then, the removing beam source is disposed on the holding end side of the sample with respect to the normal L of the cross section so that the irradiating direction of the inert ion beam is tilted at the tilt angle θ to the normal L with respect to the cross section.