Calibration method
In some preferred embodiments of the present invention, a method of performing calibration of an optical axis of a sensor installed on a hand of an arm of a robot by obtaining misalignment of the optical axis of the sensor relative to the hand or by obtaining misalignment of the hand relative to the...
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| Sprache: | eng |
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| Zusammenfassung: | In some preferred embodiments of the present invention, a method of performing calibration of an optical axis of a sensor installed on a hand of an arm of a robot by obtaining misalignment of the optical axis of the sensor relative to the hand or by obtaining misalignment of the hand relative to the arm is provided. A method of performing calibration by detecting a teaching tool disposed at a semiconductor wafer placing position of a storage container or a carrying device by a sensor installed on a hand of a robot to teach the position of the semiconductor wafer to the robot includes a step of placing the teaching tool at specified position with the robot , a step of predicting the position of the teaching tool detecting the teaching tool with the sensor , and a step of obtaining a difference between the position of the teaching tool and the predicted value. |
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