Hermetic pressure sensing device

cdeb, bA pressure sensing device is shown having a ceramic capacitive sensing element received in a chamber formed in a hexport housing. The hexport housing has a fluid passageway communicating with a recessed chamber formed in a bottom wall circumscribed by an annular platform shoulder. A thin flex...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Amore, Alan G, Giasson, Eric J, Ogilvie, James I, Greene, Stephen P, Field, David J, Willner, Andrew F, Attaset, Vanvisa
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:cdeb, bA pressure sensing device is shown having a ceramic capacitive sensing element received in a chamber formed in a hexport housing. The hexport housing has a fluid passageway communicating with a recessed chamber formed in a bottom wall circumscribed by an annular platform shoulder. A thin flexible metal diaphragm is hermetically attached to the bottom wall along the platform shoulder. A curable adhesive resin having a thermal coefficient of expansion and modulus of elasticity appropriately matching that of sensing element, such as polyurethane, is cast between the sensing element and the metal diaphragm forming, when cured, a layer bonded to both members resulting in a sensor that is effective in monitoring negative as well as positive fluid pressures. In one embodiment a ring is used to define layer laterally and in a second embodiment an insulator sleeve and shield sleeve which receives pressure sensing element each have an open end with an inwardly extending lip that define layer laterally.