Hermetic pressure sensing device
cdeb, bA pressure sensing device is shown having a ceramic capacitive sensing element received in a chamber formed in a hexport housing. The hexport housing has a fluid passageway communicating with a recessed chamber formed in a bottom wall circumscribed by an annular platform shoulder. A thin flex...
Gespeichert in:
Hauptverfasser: | , , , , , , |
---|---|
Format: | Patent |
Sprache: | eng |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | cdeb, bA pressure sensing device is shown having a ceramic capacitive sensing element received in a chamber formed in a hexport housing. The hexport housing has a fluid passageway communicating with a recessed chamber formed in a bottom wall circumscribed by an annular platform shoulder. A thin flexible metal diaphragm is hermetically attached to the bottom wall along the platform shoulder. A curable adhesive resin having a thermal coefficient of expansion and modulus of elasticity appropriately matching that of sensing element, such as polyurethane, is cast between the sensing element and the metal diaphragm forming, when cured, a layer bonded to both members resulting in a sensor that is effective in monitoring negative as well as positive fluid pressures. In one embodiment a ring is used to define layer laterally and in a second embodiment an insulator sleeve and shield sleeve which receives pressure sensing element each have an open end with an inwardly extending lip that define layer laterally. |
---|