Device for handling substrates inside and outside a clean room
A device for handling substrates inside and outside a clean room is provided with a locking transfer device, by which means a substrate cassette that is accommodated in a box in clean-room conditions can be removed from or placed in said box; and with a first handling device, by which means the subs...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A device for handling substrates inside and outside a clean room is provided with a locking transfer device, by which means a substrate cassette that is accommodated in a box in clean-room conditions can be removed from or placed in said box; and with a first handling device, by which means the substrates can be placed in or removed from the cassette. According to the invention, a storage area for a plurality of cassette boxes is positioned on or above the clean room and the locking transfer device is provided between the storage area and the clean room, so that various work and production steps can be combined in such a way as to save space. |
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