Thin-film transistor and method of fabricating the same

Provided are a thin-film transistor formed by connecting polysilicon layers having different conductivity types with each other which prevents occurrence of inconvenience resulting from diffusion of impurities and a method of fabricating the same. A drain, a channel and a source are integrally forme...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Maegawa, Shigeto, Ipposhi, Takashi, Iwamatsu, Toshiaki, Maeda, Shigenobu, Kim, Il-Jung, Tsutsumi, Kazuhito, Kuriyama, Hirotada, Ishigaki, Yoshiyuki, Ukita, Motomu, Tsutsumi, Toshiaki
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Provided are a thin-film transistor formed by connecting polysilicon layers having different conductivity types with each other which prevents occurrence of inconvenience resulting from diffusion of impurities and a method of fabricating the same. A drain, a channel and a source are integrally formed on a surface of a second oxide film by polysilicon. The drain is formed to be connected with a pad layer (second polycrystalline semiconductor layer) through a contact hole which is formed to reach an upper surface of the pad layer. The pad layer positioned on a bottom portion of the contact hole (opening) is provided with a boron implantation region BR.