Anisotropic conductive connector, probe member, wafer inspecting device, and wafer inspecting method

Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Setaka, Ryoji, Naoi, Masaya, Sato, Katsumi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed.