Group III-nitride layers with patterned surfaces

Group III-nitride layers with patterned surfaces

An apparatus includes a crystalline substrate, a layer of a first group III-nitride located on a planar surface of the substrate, and a layer of a second group III-nitride located over the layer of the first group III-nitride. The first and second group III-nitrides have different alloy compositions...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chowdhury, Aref, Ng, Hock Min, Slusher, Richart Elliott
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An apparatus includes a crystalline substrate, a layer of a first group III-nitride located on a planar surface of the substrate, and a layer of a second group III-nitride located over the layer of the first group III-nitride. The first and second group III-nitrides have different alloy compositions. The layer of second group III-nitride may have a pattern of columnar holes or trenches therein. The apparatus may include a plurality of pyramidal field-emitters that include the second group III-nitride.