Wafer probecard interface

Apparatus and method for testing a device wafer having a plurality of devices formed thereon. One embodiment of the invention provides an interface wafer comprising a plurality of contact pads disposed on a first surface for contacting a plurality of device pads on the device wafer and a plurality o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Ma, David Suitwai
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Apparatus and method for testing a device wafer having a plurality of devices formed thereon. One embodiment of the invention provides an interface wafer comprising a plurality of contact pads disposed on a first surface for contacting a plurality of device pads on the device wafer and a plurality of interface pads disposed on a second surface for contacting probe needles on a probe card, wherein the plurality of interface pads are electrically connected to the plurality of contact pads and wherein the plurality of interface pads are disposed in a relaxed-pitch arrangement as compared to the plurality of contact pads.