Production method of gas sensor

To provide a method for producing a sensing film for gas sensors by sintering particles comprising a metal or a metal oxide on a substrate, where the sensing film for gas sensors having excellent sensor properties such as sensitivity and responsibility can be easily and simply formed. A nano-meter o...

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Bibliographische Detailangaben
Hauptverfasser: Totokawa, Masashi, Matsuba, Yorishige, Misawa, Yoshihisa, Gotoh, Hideyuki, Osako, Katsuhisa, Oda, Masaaki, Saito, Norimichi, Suzuki, Toshihiro, Abe, Noriyuki
Format: Patent
Sprache:eng
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Zusammenfassung:To provide a method for producing a sensing film for gas sensors by sintering particles comprising a metal or a metal oxide on a substrate, where the sensing film for gas sensors having excellent sensor properties such as sensitivity and responsibility can be easily and simply formed. A nano-meter order particle, a dispersant for preventing aggregation of the particles, and a scavenger for trapping the dispersant at the sintering are mixed in a solvent to prepare a paste body, and this paste body is coated on a base material and fired, thereby forming a sensing film.