Passivation layer structure

A conductor layer is patterned into flat portions, for example of a fingerprint sensor that effects capacitive measurement. The conductor layer is fragmented in a lattice-like manner by cutouts so that an applied passivation layer rests on a base layer that is present beneath the conductor layer. Th...

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Bibliographische Detailangaben
Hauptverfasser: Röhl, Siegfried, Von Basse, Paul-Werner, Scheiter, Thomas, Sasse, Thorsten, Opolka, Heinz
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A conductor layer is patterned into flat portions, for example of a fingerprint sensor that effects capacitive measurement. The conductor layer is fragmented in a lattice-like manner by cutouts so that an applied passivation layer rests on a base layer that is present beneath the conductor layer. The interlaminar shear strength of the passivation is increased in this way.