Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method
A kit of parts for assembling an optical element for use in a lithographic apparatus includes a large number of different small pieces which direct light into respective regions of the pupil plane of the radiation system and/or change the polarization state of incident radiation. The previously manu...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A kit of parts for assembling an optical element for use in a lithographic apparatus includes a large number of different small pieces which direct light into respective regions of the pupil plane of the radiation system and/or change the polarization state of incident radiation. The previously manufactured pieces arc selected and assembled into an optical element to rapidly create a desired intensity distribution. The optical element may also be disassembled and the pieces reused. |
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