Thermal mass flow sensor
A thermal mass flow sensor is disclosed that includes a housing having a first sensor region and a second sensor region, a first thin film temperature sensor formed at the first sensor region and a second thin film temperature sensor formed at the second sensor region. A heating element is arranged...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A thermal mass flow sensor is disclosed that includes a housing having a first sensor region and a second sensor region, a first thin film temperature sensor formed at the first sensor region and a second thin film temperature sensor formed at the second sensor region. A heating element is arranged to heat the first temperature sensor and a controller is operably connected to the first temperature sensor, the second temperature sensor and the heating element, and controls a power level to the heating element to maintaining a temperature difference between the first temperature sensor and the second temperature sensor. A thin film temperature sensor and a method of using the thermal mass flow sensor are also disclosed. |
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