Infrared sensor

An infrared sensor formed as a membrane on a substrate and detecting infrared rays by an infrared detector on that membrane, wherein even if an adhesive used for mounting the infrared sensor on a mounting surface creeps up to the membrane, it is made possible to prevent a drop in the sensor sensitiv...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Hamamoto, Kazuaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An infrared sensor formed as a membrane on a substrate and detecting infrared rays by an infrared detector on that membrane, wherein even if an adhesive used for mounting the infrared sensor on a mounting surface creeps up to the membrane, it is made possible to prevent a drop in the sensor sensitivity by mounting the infrared sensor on a mounting surface by an adhesive having a heat conductivity of not more than seven times the heat conductivity of a fluid present in the inner cavity below the membrane.