Semiconductor memory with vertical charge-trapping memory cells and fabrication

Outside a memory cell field, bit-line contacts are provided on the top bit lines and additional bit-line contacts are provided on the lower bit lines and are each connected in an electrically conductive way to a metallization layer provided for wiring. The bit-line contacts for the upper bit lines a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kleint, Christoph, Deppe, Joachim, Ludwig, Christoph, Sachse, Jens-Uwe
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Outside a memory cell field, bit-line contacts are provided on the top bit lines and additional bit-line contacts are provided on the lower bit lines and are each connected in an electrically conductive way to a metallization layer provided for wiring. The bit-line contacts for the upper bit lines and the additional bit-line contacts for the lower bit lines are formed on opposite sides of the memory cell field and portions of the isolation trenches are present between the additional bit-line contacts.