Slotted substrates and methods and systems for forming same

Methods and systems for forming slots in a substrate that has opposing first and second surfaces. The method makes a laser cut through either the first or second surface of the substrate sufficient to form a first trench. Material is also removed through the other of the first and second surfaces ef...

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Bibliographische Detailangaben
Hauptverfasser: Rivas, Rio T, Buswell, Shen, Khavari, Mehrgan, Pollard, Jeffrey R
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Methods and systems for forming slots in a substrate that has opposing first and second surfaces. The method makes a laser cut through either the first or second surface of the substrate sufficient to form a first trench. Material is also removed through the other of the first and second surfaces effective to form, in combination with the laser cut, a slot. At least a portion of the slot passes entirely through the substrate, and the slot has an aspect ratio greater than or equal to 1.