Resonance scanner
A resonance scanner, wherein a frame, a drive plate, a mirror and torsion springs form an actuator part, said drive plate being attached within the frame by two first torsion springs such that the drive plate can oscillate about a common first axis of torsion of both torsion springs, said mirror bei...
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Sprache: | eng |
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Zusammenfassung: | A resonance scanner, wherein a frame, a drive plate, a mirror and torsion springs form an actuator part, said drive plate being attached within the frame by two first torsion springs such that the drive plate can oscillate about a common first axis of torsion of both torsion springs, said mirror being attached within the drive plate by two second torsion springs such that the mirror can oscillate about a common second axis of torsion of both torsion springs, and said first axis of torsion and said second axis of torsion being parallel to each other; wherein, further, only the frame of the actuator part is attached to side walls of a box-shaped stator part, a drive means (stator electrodes or coil ) is arranged at a bottom of the stator part only in the region of the geometrical surface area of the drive plate and said bottom has a recess in the region of the geometrical surface area of the mirror, which recess is dimensioned at least such that a maximum mechanical deflection of the mirror is not limited by the bottom, said drive means (stator electrodes or coil ) applying a force only directly to the drive plate and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror, which differs from the eigenfrequency of the drive plate. |
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