Methods of fabricating fluid ejection devices

In one example embodiment, a method of fabricating a fluid ejection device is provided. The method can including fabricating a thinflim structure on a device substrate and forming a peripheral break trench structure in a first surface of the substrate circumscribing a region in which a feed slot is to be formed through the substrate. Subsequently the substrate can be abrasively machined from a second surface of the substrate to the break trench structure to form the feed slot.