Variable speed pump control

A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Curry, Mark William, Greenbank, Daniel Paul, Lu, Danny Cam Toan
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.