Vacuum sensor
An apparatus and method for measuring the vapor or gas content of a vacuum chamber by a vapor sensor located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump and them referencing the sensor...
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| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | An apparatus and method for measuring the vapor or gas content of a vacuum chamber by a vapor sensor located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump and them referencing the sensor response to the chamber gas during the evacuation cycle. |
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