Radiation detecting element and method of manufacturing the same

The present invention provides a method of preventing or reducing X-ray-induced temporal changes of a semiconductor photoelectric conversion film formed on a TFT substrate, in which a protective film or sheet is used to protect the semiconductor photoelectric conversion film in order to improve weat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tsutsui, Hiroshi, Kaneko, Katsuyuki, Yuzu, Takayoshi, Yamamoto, Toshiyoshi, Il, Yoshiteru
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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