Method for the purification of hydrogen peroxide solutions
The invention relates to a novel chromatographic process for the further purification of hydrogen peroxide solutions, giving high-purity solutions which can be employed in semiconductor technology under today's high purity requirements.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention relates to a novel chromatographic process for the further purification of hydrogen peroxide solutions, giving high-purity solutions which can be employed in semiconductor technology under today's high purity requirements. |
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