Method for fabricating liquid crystal display device
A method of fabricating liquid crystal display devices that includes plasma etching an insulation layer while simultaneously removing contaminates from the exposed surface of a substrate. Thinning of the substrate can then be performed by a subsequent etch process to form a highly planar substrate s...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of fabricating liquid crystal display devices that includes plasma etching an insulation layer while simultaneously removing contaminates from the exposed surface of a substrate. Thinning of the substrate can then be performed by a subsequent etch process to form a highly planar substrate surface that can improve the picture quality of the completed LCD device. |
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