Probe station
A chuck assembly includes a rotational member and an auxiliary chuck. The rotational member is suitable for supporting a chuck thereon wherein the rotational member is rotatable with respect to the chuck assembly. The auxiliary chuck is free from rotating with respect to the chuck assembly.
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| creator | Nordgren, Greg Dunklee, John |
| description | A chuck assembly includes a rotational member and an auxiliary chuck. The rotational member is suitable for supporting a chuck thereon wherein the rotational member is rotatable with respect to the chuck assembly. The auxiliary chuck is free from rotating with respect to the chuck assembly. |
| format | Patent |
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| language | eng |
| recordid | cdi_uspatents_grants_06914423 |
| source | USPTO Issued Patents |
| title | Probe station |
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