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A chuck assembly includes a rotational member and an auxiliary chuck. The rotational member is suitable for supporting a chuck thereon wherein the rotational member is rotatable with respect to the chuck assembly. The auxiliary chuck is free from rotating with respect to the chuck assembly.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A chuck assembly includes a rotational member and an auxiliary chuck. The rotational member is suitable for supporting a chuck thereon wherein the rotational member is rotatable with respect to the chuck assembly. The auxiliary chuck is free from rotating with respect to the chuck assembly. |
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