Anti-stratification-solution delivery system for spin-on dielectrics

An anti-stratification-delivery system comprises a multi-zone-refrigeration unit having at least first and second zone temperature controllers, the first and second zone temperature controllers are capable of being set at different temperatures to establish a temperature gradient in a liquid, the te...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Zhao, Jun, Roberts, Rick J
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An anti-stratification-delivery system comprises a multi-zone-refrigeration unit having at least first and second zone temperature controllers, the first and second zone temperature controllers are capable of being set at different temperatures to establish a temperature gradient in a liquid, the temperature gradient being sufficient to cause natural-thermal convention within the liquid to stir a colloid suspended in the liquid to an approximately uniform-colloidal suspension; and a delivery system configured to dispense the approximately uniform-colloidal suspension.