Preparation of largely HBr-free HCI gas and largely HBr-free aqueous HCI solution

The present invention relates to a process for preparing largely HBr-free HCl gas and largely HBr-free aqueous HCl solution, which comprises the following steps: The process of the present invention allows high-purity aqueous HCl solution for use in the semiconductor industry to be prepared inexpens...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Schläfer, Dieter, Guth, Josef, Schlimper, Hans-Ulrich
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to a process for preparing largely HBr-free HCl gas and largely HBr-free aqueous HCl solution, which comprises the following steps: The process of the present invention allows high-purity aqueous HCl solution for use in the semiconductor industry to be prepared inexpensively and on an industrial scale. However, the purified HCl gas obtained by means of steps a) to c) can also be used for any other purposes. The invention likewise provides an apparatus for carrying out the process of the present invention.