Methods and apparatus for fluid distribution in microfluidic systems

A chemical processing microsystem useful for identifying and optimizing materials (e.g., catalysts) that enhance chemical processes or for characterizing and/or optimizing chemical processes is disclosed. The chemical processing microsystem comprises a plurality of microreactors and, in a preferred embodiment, a plurality of microseparators integral with the chemical processing microsystem . The microreactors are preferably diffusion-mixed microreactors formed in a plurality of laminae that include a modular, interchangeable candidate-material array . The material array comprises a plurality of different candidate materials (e.g., catalysts), preferably arranged at separate, individually addressable portions of a substrate (e.g., wafer). The microseparators are similarly formed in a plurality of laminae that include a modular, interchangeable adsorbent array . The adsorbent array comprises one or more adsorbents, preferably arranged at separate, individually addressable portions of a substrate to spatially correspond to the plurality of different candidate materials. Modular microfluidic distribution systems are also disclosed. The chemical processing microsystem can be integrated into a material evaluation system that enables a comprehensive combinatorial material science research program.