Ink jet recording head and method for manufacturing the same

In a method for manufacturing an ink jet recording head provided with a pressure generating chamber, this chamber includes a through-hole of a chamber plate and a pair of plates, between which plates the chamber plate is sandwiched. The processing step for forming this through-hole further includes...

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Bibliographische Detailangaben
1. Verfasser: Umehara, Shigeru
Format: Patent
Sprache:eng
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Zusammenfassung:In a method for manufacturing an ink jet recording head provided with a pressure generating chamber, this chamber includes a through-hole of a chamber plate and a pair of plates, between which plates the chamber plate is sandwiched. The processing step for forming this through-hole further includes the sub-steps of forming a first resist film and a second resist film on a first and a second surface of the chamber plate, respectively, wherein the resist films assume substantially a same shape, but are different in length from each other when measured in a direction parallel to a flow direction of ink, and etching away both the first and second surface of the chamber plate using the resist films as its masks so that the through-hole is formed in the chamber plate and serves as the pressure generating chamber.