Fabrication of devices with fibers engaged to grooves on substrates

Fabrication of devices with fibers engaged to grooves on substrates

Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring m...

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Bibliographische Detailangaben
Hauptverfasser: Koinkar, Vilas, Collins, Timothy C, Costa, Joannes M, Levert, Joseph A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.