Test structure for determining the stability of electronic devices comprising connected substrates

The present invention allows testing of bump connections under predefined conditions. To this end, a test structure including two substrates, each substrate having bond pads that are provided for flip-chip connecting both substrates. These bond pads may have electrical contact to other bond pads and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Böttcher, Mathias, Werner, Thomas
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention allows testing of bump connections under predefined conditions. To this end, a test structure including two substrates, each substrate having bond pads that are provided for flip-chip connecting both substrates. These bond pads may have electrical contact to other bond pads and/or special probe pads which are provided for making electrical connections to external devices. Electrically conductive bumps are formed on at least some of the bond pads of one of the substrates, and the bumps are electrically and mechanically connected to the bond pads in the other substrate.