Deionized water spray on loss of fluid processing tank exhaust

Methods and apparatus are provided for increasing the safety of a clogged or failed exhaust system. In accordance with a first embodiment, an apparatus is provided that includes (1) a tank adapted to contain a processing fluid; (2) an exhaust system coupled to the tank and adapted to exhaust a gas from the tank, the gas including a hazardous vapor of the processing fluid; (3) a sensor coupled to the exhaust system and adapted to detect a rate at which gas is exhausted from the tank; and (4) a fluid supply mechanism adapted to supply a diluting fluid to the tank so as to dilute the processing fluid contained by the tank if the rate at which gas is exhausted from the tank is less than a predetermined rate. Systems, methods and computer program products are provided in accordance with this and other embodiments.