Method and device for laser drilling organic materials

For the laser drilling of organic materials, in particular for making blind holes in dielectric layers, a frequency-doubled Nd-vanadate laser with the following parameters is used:

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Bibliographische Detailangaben
Hauptverfasser: De Steur, Hubert, Heerman, Marcel, Van Puymbroeck, Jozef
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:For the laser drilling of organic materials, in particular for making blind holes in dielectric layers, a frequency-doubled Nd-vanadate laser with the following parameters is used: