Method of fabricating a heterojunction bipolar transistor

A method of fabricating a III-V heterostructure semiconductor device. The method includes the steps of forming at least one conductive post overlying a semiconductor region to form a structure, encapsulating the structure and the conductive post to form a planarized cured passivation layer, and expo...

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Bibliographische Detailangaben
Hauptverfasser: Hamm, Robert Alan, Kopf, Rose Fasano, Ryan, Robert William, Tate, Alaric, Wang, Yu-Chi
Format: Patent
Sprache:eng
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Zusammenfassung:A method of fabricating a III-V heterostructure semiconductor device. The method includes the steps of forming at least one conductive post overlying a semiconductor region to form a structure, encapsulating the structure and the conductive post to form a planarized cured passivation layer, and exposing the conductive post through the planarized cured passivation layer to form the semiconductor device.