Processing chamber feedthru coupler

A coupling or barrel connector is disclosed for interconnecting an anode leg of an anode assembly with an anode feedthru mounted on a processing chamber. One end of the barrel connector is threaded onto the anode feedthru. The opposite end of the barrel connector receives an end portion of an anode...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Grow, John
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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