Processing chamber feedthru coupler
A coupling or barrel connector is disclosed for interconnecting an anode leg of an anode assembly with an anode feedthru mounted on a processing chamber. One end of the barrel connector is threaded onto the anode feedthru. The opposite end of the barrel connector receives an end portion of an anode...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A coupling or barrel connector is disclosed for interconnecting an anode leg of an anode assembly with an anode feedthru mounted on a processing chamber. One end of the barrel connector is threaded onto the anode feedthru. The opposite end of the barrel connector receives an end portion of an anode leg. A removable retention pin in effect locks the anode leg onto the barrel connector. |
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