Plasma source with reliable ignition
The invention relates to a plasma source whose plasma is ignited by an electric voltage. To be able to carry out the ignition at relatively low voltages, a plate provided with holes is provided beneath a plasma volume, which is disposed above a wall of a plasma chamber. Through this plate an ignitio...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention relates to a plasma source whose plasma is ignited by an electric voltage. To be able to carry out the ignition at relatively low voltages, a plate provided with holes is provided beneath a plasma volume, which is disposed above a wall of a plasma chamber. Through this plate an ignition volume is formed beneath the plasma volume with a higher pressure than in the plasma volume, in which the plasma ignites first. The ignition is subsequently propagated through the holes of the plate into the plasma volume. |
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