Creating a process recipe based on a desired result
1. Field of the Invention A method and apparatus is provided for creating a process recipe based on a desired result. The method comprises providing at least one workpiece to a processing tool for processing, providing the desired result for the workpiece to the processing tool, and generating a rec...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | 1. Field of the Invention
A method and apparatus is provided for creating a process recipe based on a desired result. The method comprises providing at least one workpiece to a processing tool for processing, providing the desired result for the workpiece to the processing tool, and generating a recipe for processing the workpiece based on the desired result. |
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