Purification of group IVb metal halides

Group IVb metal tetrahalides find use in the manufacture of integrated circuits and heavy metal glasses for fiber optics. In the manufacture of the integrated circuits and glasses, the industry desires a high purity Group IVb metal substantially free of trace elements. However, in the manufacture of...

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Bibliographische Detailangaben

Hauptverfasser:	Bowen, Heather Regina, Roberts, David Allen
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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