Cathodic arc disposable sting shielding

The present invention relates to an improved shielding arrangement for a cathodic arc vapor deposition system. A shielding arrangement is described for a cathodic arc deposition apparatus which includes a contactor formed from an electrically conductive material and having an axially extending shaft...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Marszal, Dean N
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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