Cathodic arc disposable sting shielding
The present invention relates to an improved shielding arrangement for a cathodic arc vapor deposition system. A shielding arrangement is described for a cathodic arc deposition apparatus which includes a contactor formed from an electrically conductive material and having an axially extending shaft...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention relates to an improved shielding arrangement for a cathodic arc vapor deposition system.
A shielding arrangement is described for a cathodic arc deposition apparatus which includes a contactor formed from an electrically conductive material and having an axially extending shaft and a cathode. The shielding arrangement includes a cup formed from an electrically conductive material surrounding a portion of the contactor shaft and a shield for preventing material from being deposited on the cup. The shielding arrangement includes a removable ring shield attached to the cup and a cylindrical shield formed from an electrically non-conductive material surrounding the cup and a portion of the shaft. |
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