Slurry mixing feeder and slurry mixing and feeding method

a) Field of the Invention A mixing feeder is disclosed for a slurry that contains liquids at a desired mixing ratio. The liquids include at least a dispersion of fine abrasive particles and a solution of an additive. The slurry mixing feeder has suction ports for sucking the liquids from a reservoir; a discharge port for feeding the slurry to the chemical mechanical polishing machine; feed pumps arranged in feed lines for the respective liquids, the feed lines extending from the individual suction ports to the discharge port, for sucking the individual liquids in specific amounts to give the mixing ratio and delivering the thus-sucked liquids toward the discharge port; and dampers and pressure-regulated restrictors arranged in combination in the feed lines on delivery sides of the feed pumps, respectively.