Method and apparatus for proactive dispatch system to improve line balancing

1. Field of the Invention A method, apparatus, and system is provided for a proactive dispatch system to improve line balancing. At least one request for processing a semiconductor wafer is received. A line-balancing analysis based upon the request is performed. At least one semiconductor wafer base...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Allen, Jr., Sam H, Conboy, Michael R, Grover, Jason A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of the Invention A method, apparatus, and system is provided for a proactive dispatch system to improve line balancing. At least one request for processing a semiconductor wafer is received. A line-balancing analysis based upon the request is performed. At least one semiconductor wafer based upon the line-balancing analysis is processed.