Method of forming an assembly of stacked layers
The invention relates to the field of multi-layer deposited then film structures. In an assembly of layers, a first layer has a recess, a second layer is deposited over the first layer, and a third layer is deposited over the second layer and fills the recess. The material of the third layer is less...
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Sprache: | eng |
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Zusammenfassung: | The invention relates to the field of multi-layer deposited then film structures.
In an assembly of layers, a first layer has a recess, a second layer is deposited over the first layer, and a third layer is deposited over the second layer and fills the recess. The material of the third layer is less wear resistant than the second layer. After forming the second layer, the assembly is polished to create a flat and smooth surface. The polishing is stopped upon reaching the second layer. |
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