Aluminum-copper bond pad design and method of fabrication

1. Field of the Invention A process for forming a bond pad structure to be used to accommodate a subsequent wire bond, has been developed. The process features defining a bond pad opening in a composite insulator stack, exposing a portion of a top surface of an upper level metal interconnect structu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Chen, Kuo-Chou, Hsu, Huai-Jen
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:1. Field of the Invention A process for forming a bond pad structure to be used to accommodate a subsequent wire bond, has been developed. The process features defining a bond pad opening in a composite insulator stack, exposing a portion of a top surface of an upper level metal interconnect structure at the bottom of the bond pad opening. The bond pad opening is formed with a top portion of the composite insulator stack laterally pulled back from a bottom portion of the same composite insulator stack. The bond pad structure, comprised of aluminum-copper, is then formed entirely in the bond pad opening, with the top surface of the bond pad structure lower than the top surface of the composite insulator stack, thus resulting in a bond pad structure topography offering reduced risk of damage during subsequent pre-wire bonding procedures.